Laser etching rates of sapphire glass using metal targets

Abstract

Q-switched Nd:YAG laser with an output power of 40 watts has been used to study LIPAA etch rates of Sapphire glass in air with different target materials including stainless steel, brass and mild steel. Experiments showed that an ablation depth of 50μm has been achieved in sapphire at a zero target-substrate gap at ambient pressure. The etch depth versus laser scan speed and laser power have also been studied. An etched depth of 200μm is achieved at a scan speed of 20mm/sec with stainless steel as target. © Published under licence by IOP Publishing Ltd.