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Investigation of Al-ZERODUR interface by Raman and secondary ion mass-spectroscopy

  • Berezhinsky L
Semiconductor physics, quantum electronics and optoelectronics (2008) 8(2) 37-40
DOI: 10.15407/spqeo8.02.037
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Abstract

The interface of ZERODUR ceramics and thin aluminium film was investigated by Raman and secondary ion mass-spectroscopy techniques. Possible chemical reactions at the interface is briefly analyzed and compared with experimental data. Contributions of amorphous and crystalline phases of ZERODUR to Raman spectra are discussed.

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Berezhinsky, L. I. (2008). Investigation of Al-ZERODUR interface by Raman and secondary ion mass-spectroscopy. Semiconductor Physics, Quantum Electronics and Optoelectronics, 8(2), 37–40. https://doi.org/10.15407/spqeo8.02.037

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