Single chip micro gc with integrated heterogeneous nanomaterial sensor array for multiparameter gas sensing

Abstract

We present a PDMS micromolded gas chromatography system on chip with integrated gas sample injection, heating elements, as well as a nanomaterial based chemiresistor array for gas detection. This device is the first realization of a micromolded (as opposed to etched) microscale gas chromatography (µGC) system. The PDMS mold serves the dual purpose of creating the column geometry as well as acting as the stationary phase during the gas chromatography analysis. A glass wafer acts not only to seal to column but also as a platform for a micropatterned detector and heating element. A chemiresitor array consisting of carbon nanotubes (CNT), vanadium oxide nanowires (VOx) and reduced graphene oxide (rGO) provide cross-calibrated detection of gas constituents after chromatographic separation to yield a multiparameter gas analysis.