Metal-assisted chemical etching (MACE) of silicon is receiving much interest as a controllable method of generating silicon nanostructures of varied forms, including porous silicon. The various morphologies, etch chemistry variables (e.g., metal catalysts, substrate type, electrolyte temperature), and potential applications of the resulting nanostructures are reviewed.
CITATION STYLE
Chiappini, C. (2014). MACE silicon nanostructures. In Handbook of Porous Silicon (pp. 171–186). Springer International Publishing. https://doi.org/10.1007/978-3-319-05744-6_17
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