Impact of ion nitriding on phase composition, structure and properties of carbon films doped with metals

Abstract

The main modification laws of properties, phase composition and mechanical properties of single component and metal alloyed (Cr, Ti, Cu) carbon coatings subjected to ion nitriding are defined. It is stated that ion nitriding gives rise to the fraction of sp2-phase while reducing the cluster size in the surface layers. The formation of CNx compounds with dominating bonds of N-Csp2 type is determined at ion nitriding of carbon containing coatings. The single component carbon coatings being ion nitrided are characterized by more dispersed structure, bigger content of N-Csp3 bonds in comparison with the structure and composition of coatings formed at the conditions of ion assistance or with the appearance of molecular nitrogen.