Optimal cross-coupled synchronization control of a precision motion stage driven by dual linear motors

Abstract

In this paper, the optimal cross-coupled synchronization control of a precision motion stage driven by dual linear motors is investigated. The single axis controller of linear motor is composed of a cascade PID/PI controller and a hybrid velocity and acceleration controller (VFC/AFC). The cross-coupled synchronization control scheme is incorporated with the hybrid trajectory tracking PID/PI+VFC/AFC controller to improve the tracking performance of single axis and reduce the synchronization error of dual linear motors simultaneously. The design of cross-coupled synchronization controller is formulated as an optimal control problem in which the performance index to be minimized weights the synchronization error explicitly. Experimental results show that the optimal cross-coupled synchronization control scheme has superior synchronization performance than the independent axis control scheme in synchronization error reduction. © 2013 Springer-Verlag Berlin Heidelberg.