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Thickness Determination of Thin Insulating Layers

  • Klein P
  • Röhrbacher K
  • Andrae M
  • et al.
Springer Vienna, (1996), 377-389
DOI: 10.1007/978-3-7091-6555-3_30
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Klein, P., Röhrbacher, K., Andrae, M., & Wernisch, J. (1996). Thickness Determination of Thin Insulating Layers. In Microbeam and Nanobeam Analysis (pp. 377–389). Springer Vienna. https://doi.org/10.1007/978-3-7091-6555-3_30

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