Abstract
In this work, we develop a systematic method for the construction of linear stochastic partial differential equation (PDE) models for feedback control of surface roughness in thin film deposition using kinetic Monte-Carlo simulations. The method is applied to a representative deposition process and is successfully validated through simulations. © 2006 Springer-Verlag Berlin Heidelberg.
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CITATION STYLE
Ni, D., & Christofides, P. D. (2006). Construction of stochastic PDEs and predictive control of surface roughness in thin film deposition. In Model Reduction and Coarse-Graining Approaches for Multiscale Phenomena (pp. 375–402). Springer Berlin Heidelberg. https://doi.org/10.1007/3-540-35888-9_17
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