QCM Sensors Based on In2O3 Nano-films Obtained by a Pulsed Plasma Deposition Technique

Abstract

In this paper Quartz Crystal Microbalance (QCM) gas sensors obtained depositing nano-films of In2O3 over AT-cut 10, MHz resonators are presented. Films are grown by a Low-Temperature Pulsed Electron Deposition (LTPED), a single-stage growth technology by which films can be deposited on a variety of different substrates Rampino et al. (Appl Phys Lett 101(13):132107, 2012 [1]) down to a few nms thickness, allowing for maintaining large quality factors of the quartzes and for realizing very stable oscillators. The gas sensing performance of these devices are studied by means of experiments with a toxic gas, NO2, water vapor and ethanol. The effect of UV irradiation on the sensor response is also studied. The sensors provide stable and repeatable measurements, a large response to water vapor, and respond reversibly to NO2.