Abstract
In this paper, sensitive piezoresistive graphene pressure sensor is designed and analysed for applications in field of biomedical for healthcare devices. The relationship between applied pressure and output voltage was studied by finite element modelling and simulation method in COMSOL. The results show that sensitivity of 3.89 mV/psi is achieved on application of 0–100 psi pressure. The effect of frequency variation on sensitivity is also investigated for this pressure sensor. Nonlinearity is calculated as a function of applied pressure and obtained output voltage. Linear behaviour is noticed between 40 and 90 psi.
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Nag, M., Lamba, M., Singh, K., & Kumar, A. (2020). Modelling and Simulation of MEMS Graphene Pressure Sensor for HealthCare Devices. In Smart Innovation, Systems and Technologies (Vol. 174, pp. 607–612). Springer. https://doi.org/10.1007/978-981-15-2647-3_56
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