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Electron Beam—Specimen Interactions: Interaction Volume

  • Goldstein J
  • Newbury D
  • Michael J
  • et al.
Springer New York, (2018), 1-14
DOI: 10.1007/978-1-4939-6676-9_1
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Abstract

By selecting the operating parameters of the SEM electron gun, lenses, and apertures, the microscopist controls the characteristics of the focused beam that reaches the specimen surface: energy (typically selected in the range 0.1–30 keV), diameter (0.5 nm to 1...

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APA

Goldstein, J. I., Newbury, D. E., Michael, J. R., Ritchie, N. W. M., Scott, J. H. J., & Joy, D. C. (2018). Electron Beam—Specimen Interactions: Interaction Volume. In Scanning Electron Microscopy and X-Ray Microanalysis (pp. 1–14). Springer New York. https://doi.org/10.1007/978-1-4939-6676-9_1

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