Arduino-Based Tuned Electromagnetic Shaker Using Relay for MEMS Cantilever Beam

Abstract

These days Micro-Electro-Mechanical Systems (MEMS) is the most interested field like a pie chart of research fields. Many MEMS devices like microsensor, microactuator, and microenergy harvester are the backbone of electronics applications in the form of sensors and actuator. These all are mostly based on the basic concept of deflection of cantilever beam. These all have requirement of vibration testing for their long-life working. This study proposes one method called Arduino-based tuneable electromagnetic shaker using relay for MEMS Cantilever beam. Tuneable means we can tune its frequency according to requirement called Frequency Tuning Concept (FTP). In this paper, we designed and developed electronics shaker controlled by Arduino circuit with 12 V relay which can be controlled by programmable Arduino-Uno board. By this, we can check the resonance frequency modes of the MEMS sensors and actuators, which is the substitute measurement method rather than the frequency measurement of beam by very costly existing vibration shakers.