Sputter-deposited indium-tin oxide thin films for acetaldehyde gas sensing

5Citations
Citations of this article
15Readers
Mendeley users who have this article in their library.

Abstract

Reactive dual-target DC magnetron sputtering was used to prepare In-Sn oxide thin films with a wide range of compositions. The films were subjected to annealing post-treatment at 400 °C or 500 °C for different periods of time. Compositional and structural characterizations were performed by X-ray photoelectron spectroscopy, energy dispersive X-ray spectroscopy, X-ray diffraction, Rutherford backscattering and scanning electron microscopy. Films were investigated for gas sensing at 200 °C by measuring their resistance response upon exposure to acetaldehyde mixed with synthetic air. We found that the relative indium-to-tin content was very important and that measurable sensor responses could be recorded at acetaldehyde concentrations down to 200 ppb, with small resistance drift between repeated exposures, for both crystalline SnO 2 -like films and for amorphous films consisting of about equal amounts of In and Sn. We also demonstrated that it is not possible to prepare crystalline sensors with intermediate indium-to-tin compositions by sputter deposition and post-annealing up to 500 °C.

Cite

CITATION STYLE

APA

Cindemir, U., Lansåker, P. C., Österlund, L., Niklasson, G. A., & Granqvist, C. G. (2016). Sputter-deposited indium-tin oxide thin films for acetaldehyde gas sensing. Coatings, 6(2). https://doi.org/10.3390/coatings6020019

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free