Micromachining and Patterning

Abstract

Laser micromachining and patterning by laser ablation is used for the fabrication of micro-fluidic and micro-optic components. Irradiation configurations comprise direct spot writing, mask projection, and multiple beam interference. The fabrication of grooves, micro channels, micro lenses, dielectric masks, gratings, and diffractive elements is described. Special attention is paid to layer ablation in order to create planar optical structures.