Single transistor oscillator based on piezoelectric resonant nanochannel for operation in liquids

Abstract

A single transistor oscillator based on an 18 MHz piezoelectric resonant nanochannel is presented as the first demonstration of MEMS acoustic resonators with integrated nanochannels connected to a compact and portable oscillator readout enabling the sensor operation in liquids. This result represents a breakthrough for MEMS resonators operated in liquids as these devices are the first of their kind to be directly connected to a compact electronic oscillator.