A literature survey is made of the various uses of both macroporous and mesoporous silicon in individual microdevices and complex microsystems. The material has been used as a silicon wafer processing tool where it is sacrificial: in a passive role where it provides, for example, thermal or electrical isolation and in an active role where it performs a range of functions. Examples include delivering drugs, sensing, emitting light, storing hydrogen, providing filtration, or having a catalytic role.
CITATION STYLE
De Stefano, L., & Rea, I. (2014). Porous silicon for microdevices and microsystems. In Handbook of Porous Silicon (pp. 797–804). Springer International Publishing. https://doi.org/10.1007/978-3-319-05744-6_81
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