Metal (Ag/Ti)-containing hydrogenated amorphous carbon nanocomposite films with enhanced nanoscratch resistance: Hybrid PECVD/PVD system and microstructural characteristics

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Abstract

This study aimed to develop hydrogenated amorphous carbon thin films with embedded metallic nanoparticles (a–C:H:Me) of controlled size and concentration. Towards this end, a novel hybrid deposition system is presented that uses a combination of Plasma Enhanced Chemical Vapor Deposition (PECVD) and Physical Vapor Deposition (PVD) technologies. The a–C:H matrix was deposited through the acceleration of carbon ions generated through a radio-frequency (RF) plasma source by cracking methane, whereas metallic nanoparticles were generated and deposited using terminated gas condensation (TGC) technology. The resulting material was a hydrogenated amorphous carbon film with controlled physical properties and evenly dispersed metallic nanoparticles (here Ag or Ti). The physical, chemical, morphological and mechanical characteristics of the films were investigated through X-ray reflectivity (XRR), Raman spectroscopy, Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), Transmission Electron Microscopy (TEM) and nanoscratch testing. The resulting amorphous carbon metal nanocomposite films (a–C:H:Ag and a–C:H:Ti) exhibited enhanced nanoscratch resistance (up to +50%) and low values of friction coefficient (<0.05), properties desirable for protective coatings and/or solid lubricant applications. The ability to form nanocomposite structures with tunable coating performance by potentially controlling the carbon bonding, hydrogen content, and the type/size/percent of metallic nanoparticles opens new avenues for a broad range of applications in which mechanical, physical, biological and/or combinatorial properties are required.

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Constantinou, M., Nikolaou, P., Koutsokeras, L., Avgeropoulos, A., Moschovas, D., Varotsis, C., … Constantinides, G. (2018). Metal (Ag/Ti)-containing hydrogenated amorphous carbon nanocomposite films with enhanced nanoscratch resistance: Hybrid PECVD/PVD system and microstructural characteristics. Nanomaterials, 8(4). https://doi.org/10.3390/nano8040209

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