The literature on the photoetching technique of preparing photoluminescent mesoporous silicon films using both hydrofluoric acid-based and alkali electrolytes is reviewed. The benefits of using an incoherent light source and specific oxidizing agents are highlighted. The technique is particularly useful for creating thin porous regions in n-type Si wafers, SOI wafers, micromachined wafers, or those that contain electronic circuitry.
CITATION STYLE
Adachi, S. (2014). Porous silicon formation by photoetching. In Handbook of Porous Silicon (pp. 67–74). Springer International Publishing. https://doi.org/10.1007/978-3-319-05744-6_6
Mendeley helps you to discover research relevant for your work.