Rapid nonlinear analysis for electrothermal microgripper using reduced order model based Krylov subspace

Abstract

The conventional numerical analysis methods could not perform the rapid system-level simulation to MEMS especially when containing sensing and testing integrated circuit. Using reduced-order model can simulate the behavior characteristic of multiphysical energy domain models including nonlinear analysis. This paper set up the reduced-order model of electrothermal microgripper using Krylov subspace projection method. The system functions were assembled through finite element analysis using Ansys. We took the structure-electro-thermal analysis to microgripper finite element model and reduced model order through second-order Krylov subspace projection method based on Arnoldi process. The simulation result from electrothermal reduced order model of microgripper is accurate compared with finite element analysis and even more has a few computing consuming. © 2008 IOP Publishing Ltd.