Abstract
The detection of molecules or chemical compounds is a general analytical task in the efforts of chemists to obtain qualitative and/or quantitative time-and spatially resolved information on specific chemical components.[1] Examples of qualitative information include the presence or absence of certain odorant, toxic, carcinogenic, or hazardous compounds. Examples of quantitative information include concentrations, activities, or partial pressures of such specific compounds exceeding, e.g., a certain threshold-limited value or the lower explosive limits of combustible gases. © 2006 Springer-Verlag Berlin Heidelberg.
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CITATION STYLE
Hierlemann, A., & Baltes, H. (2006). Semiconductor-based chemical microsensors. In MEMS: A Practical Guide of Design, Analysis, and Applications (pp. 567–666). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-540-33655-6_11
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