Quantitative three-dimensional analysis using focused ion beam microscopy

Abstract

In this chapter, we review progress in quantitative three-dimensional chemical and microstructural volume analysis using focused ion beam tomography. A brief survey of techniques previously developed for solid state tomographic reconstructions is presented and the relevance of focused ion beam tomography to these techniques is discussed. Methods for quantitatively reconstructing three-dimensional spatial and chemical maps using focused ion beam microscopy are then discussed in detail. Finally, areas for future technique development and improvement are discussed. © 2005 Springer Science+Business Media, Inc.