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Quantitative local strain analysis of Si/SiGe heterostructures using HRTEM

  • Özdöl V
  • Phillipp F
  • Kasper E
  • et al.
Springer Berlin Heidelberg, (2008), 141-142
DOI: 10.1007/978-3-540-85156-1_71
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Özdöl, V. B., Phillipp, F., Kasper, E., & van Aken, P. A. (2008). Quantitative local strain analysis of Si/SiGe heterostructures using HRTEM. In EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany (pp. 141–142). Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-540-85156-1_71

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