Semico nductor gas sensors: Dry synthesis andapplication

Abstract

Sense and sensitivity: Dry processes allow the rapid and scalable synthesis of nanostructured metal oxide films for use as semiconductor-based gas sensors. Dense, particulate, or porous films, with thicknesses in the nm-μm range can be prepared by the appropriate synthesis and deposition method. A wide variety of oxides with controlled properties (see pictures) are obtained, allowing miniature sensing devices with improved sensitivity and stability to be developed. © 2010 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.