A study on micro grooving using PZT actuator

Abstract

Flat display panels are becoming more popular, day-by-day. Therefore, optical quality has been a major concern in recent years. In flat display panels, micro-features with such optical features as grooves and lens should be manufactured within tight form accuracy because it is directly related to their optical performance. This study presents a PZT based vibration cutting method to ensure a smoother and more uniform cutting surface in machining of micro grooves using a single crystal diamond tool. Experiments prove that the proposed method is an efficient way to produce high quality micro grooves on a flat plate die surface. © 2011 Springer-Verlag.