CITATION STYLE
Paz, V. F., Schuster, T., Frenner, K., Osten, W., Sziksai, L., Mört, M., … Bloess, H. (2009). Simulation based sensitivity analysis and optimization of Scatterometry measurements for future semiconductor technology nodes. In Fringe 2009 - 6th International Workshop on Advanced Optical Metrology (pp. 592–595). Springer Science and Business Media Deutschland GmbH. https://doi.org/10.1007/978-3-642-03051-2_101
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