Method of fabrication for encapsulated polarizing resonant gratings

Abstract

In this letter, we present a novel method of fabricating encapsulated resonant gratings. The fabrication method uses selective etching, conformal deposition, conventional lithography, and direct bonding techniques. Our letter includes simulation and experimental results, confirming a strong resonance unique to the TE polarization at 1550 nm with a 5 nm full-width at half-maximum. © 1989-2012 IEEE.