Design and fabrication of bionic micro-nano flexible sensor

Abstract

With the popularity of intelligent devices, wearable electronic devices show great market prospects. Capacitive flexible pressure sensors with sandwich structure are designed and manufactured, and their performances are studied. A novel graphene (GR)/PEDOT:PSS multi-component mixed ink was prepared based on solution blending method using silver nanowires as electrodes and PDMS as flexible substrates. The GR/PEDOT:PSS multi-component mixed ink was used as conductive material. The different GR dosage pairs were analyzed by means of SEM and electrical testing platform. At the same time, PDMS films with micro-nano structure and planar structure were prepared by using ground glass and smooth glass as templates for flexible substrates respectively. Then AgNWs/PDMS composite electrodes were prepared by spraying method. With another layer of PDMS as dielectric layer, the two electrodes were encapsulated face to face to obtain capacitive flexible pressure sensor. Finally, the influence of electrode Micro-Nanostructure on device performance was systematically studied. The results show that the sensitivity of AgNWs/PDMS composite thin film sensor with Micro-Nanostructure is 1.0 kPa-1, while that of plane AgNWs/PDMS composite thin film sensor is 0.6 kPa-1. It can be concluded that flexible substrates with Micro-Nanostructure can significantly improve the sensitivity of the device.