Abstract
This chapter provides an introduction to the piezoelectric micro-/nano-positioning system and the concerned control problems. The hysteresis compensation is solved using both feedforward and feedback control approaches to achieve a precision motion control. As a typical application of micro-/nano-positioning device, the micromanipulation application is also introduced, and the concerned position and force control problem is addressed to facilitate a delicate automated manipulation operation.
Cite
CITATION STYLE
Xu, Q., & Tan, K. K. (2016). Introduction. In Advances in Industrial Control (Vol. 174, pp. 1–20). Springer International Publishing. https://doi.org/10.1007/978-3-319-21623-2_1
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