In this paper, a spectrometer design enabling an ultrathin form factor is proposed. Local strain engineering in group III-nitride semiconductor nanostructured light-absorbing elements enables the integration of a large number of photodetectors on the chip exhibiting different absorption cut-off wavelengths. The introduction of a simple cone-shaped back-reflector at the bottom side of the substrate enables a high light-harvesting efficiency design, which also improves the accuracy of spectral reconstruction. The cone-shaped back-reflector can be readily fabricated using mature patterned sapphire substrate processes. Our design was validated via numerical simulations with experimentally measured photodetector responsivities as the input. A light-harvesting efficiency as high as 60% was achieved with five InGaN/GaN multiple quantum wells for the visible wavelengths.
CITATION STYLE
Kim, J., Cheekati, S., Sarwar, T., & Ku, P. C. (2021). Designing an ultrathin film spectrometer based on iii-nitride light-absorbing nanostructures. Micromachines, 12(7). https://doi.org/10.3390/mi12070760
Mendeley helps you to discover research relevant for your work.