Creating three-dimensional magnetic functional microdevices via molding-integrated direct laser writing

47Citations
Citations of this article
61Readers
Mendeley users who have this article in their library.

This article is free to access.

Abstract

Magnetically driven wireless miniature devices have become promising recently in healthcare, information technology, and many other fields. However, they lack advanced fabrication methods to go down to micrometer length scales with heterogeneous functional materials, complex three-dimensional (3D) geometries, and 3D programmable magnetization profiles. To fill this gap, we propose a molding-integrated direct laser writing-based microfabrication approach in this study and showcase its advanced enabling capabilities with various proof-of-concept functional microdevice prototypes. Unique motions and functionalities, such as metachronal coordinated motion, fluid mixing, function reprogramming, geometrical reconfiguring, multiple degrees-of-freedom rotation, and wireless stiffness tuning are exemplary demonstrations of the versatility of this fabrication method. Such facile fabrication strategy can be applied toward building next-generation smart microsystems in healthcare, robotics, metamaterials, microfluidics, and programmable matter.

Cite

CITATION STYLE

APA

Liu, Z., Li, M., Dong, X., Ren, Z., Hu, W., & Sitti, M. (2022). Creating three-dimensional magnetic functional microdevices via molding-integrated direct laser writing. Nature Communications, 13(1). https://doi.org/10.1038/s41467-022-29645-2

Register to see more suggestions

Mendeley helps you to discover research relevant for your work.

Already have an account?

Save time finding and organizing research with Mendeley

Sign up for free