No-scanning 3D measurement method using ultrafast dimensional conversion with a chirped optical frequency comb

Abstract

A simultaneously high-precision, wide-range, and ultrafast time-resolution one-shot 3D shape measurement method is presented. Simultaneous times of flight from multiple positions to a target encoded in a chirped optical frequency comb can be obtained from spectral interferometry. We experimentally demonstrate a one-shot imaging profile measurement of a known step height of 480 μm with μm-level accuracy. We further demonstrate the extension of the dynamic range by measuring in one shot a large step height of 3 m while maintaining high accuracy using the accurate pulse-to-pulse separation of the optical frequency comb. The proposed method with its large dynamic range and measurement versatility can be applied to a broad range of applications, including microscopic structures, objects with large size or aspect ratio, and ultrafast time-resolved imaging. This study provides a powerful and versatile tool for 3D measurement, where various ranges of measurement performances can be tailored to demand.