Simulation of Piezoelectric Sensor and Actuator Devices

Abstract

In this chapter, we will study the fundamentals of the FE method, which are important for simulating the behavior of piezoelectric sensors and actuators. The focus lies on linear FE simulations. Section 4.1 deals with the basic steps of the FE method, e.g., Galerkin?s method. Subsequently, the FE method will be applied to electrostatics (see Sect. 4.2), the mechanical field (see Sect. 4.3), and the acoustic field (see Sect. 4.4). At the end, we will discuss the coupling of different physical fields because this represents a decisive step for reliable FE simulations of piezoelectric sensors and actuators. For a better understanding, the chapter also contains several simulation examples.