Macroparticles

Abstract

The infamous macroparticle problem is the main reason why cathodic arc plasma deposition is not broadly used in high-tech applications. Macroparticles are formed at cathode spots, together with electrons and ions. They are commonly called “macroparticles” because they are very massive compared to ions and electrons. The formation and transport of macroparticles are considered, having in mind that we want to reduce, and possibly eliminate them. The size distributions can be fit by power laws, which is another indication for the self-similar nature of cathode processes. In one section, we contemplate whether macroparticles could be destroyed, e.g., by heating or by the interaction with plasma particles.