Highly sensitive two dimensional MoS2 gas sensor decorated with Pt nanoparticles

Abstract

A two-dimensional molybdenum disulfide (MoS2)-based gas sensor was decorated with Pt nanoparticles (NPs) for high sensitivity and low limit of detection (LOD) for specific gases (NH3 and H2S). The two-dimensional MoS2 film was grown at 400°C using metal organic gas vapour deposition. To fabricate the MoS2 gas sensor, an interdigitated Au/Ti electrode was deposited using the electron beam (e-beam) evaporation method with a stencil mask. The MoS2 gas sensor without metal decoration sensitively detects NH3 and H2S gas down to 2.5 and 30 ppm, respectively, at room temperature (RT). However, for improved detection of NH3 and H2S gas, we investigated the functionalization strategy using metal decoration. Pt NP decoration modulated the electronic properties of MoS2, significantly improving the sensitivity of NH3 and H2S gas by 5.58× and 4.25×, respectively, compared with the undecorated MoS2 gas sensor under concentrations of 70 ppm. Furthermore, the Pt NP-decorated MoS2 sensor had lower LODs for NH3 and H2S gas of 130 ppb and 5 ppm, respectively, at RT.