The Effect of Electric Field on Adhesion Force with Liquid in MIM Structures

Abstract

The effect of electric field on adhesion force with liquid in MIM (Metal-Insulator-Metal) structures has been experimentally researched. Two kinds of liquid (polar and non-polar) are used, and voltage is applied between steel balls and silicon wafers with silicon nitride film on, which is used to simulate MIM structures. Then the adhesion force is measured, and it is observed that the effect of polar liquid is different from non-polar liquid. The polar liquid can eliminate the electric force caused by the voltage but the non-polar liquid cannot; the adhesion force with non-polar liquid in will be changed by amplitude and applied time of voltage, which is caused by electric force and charge trapping of dielectric film. When the liquid become smaller and smaller, the effect on the model with polar liquid in will be changed; the voltage can change the adhesion force too. Because the adhesion force is depended on the capillary force which is correlative with the liquid volume too, we can adjust the adhesion force by voltage and liquid volume.