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Book Chapter

Micro/Nanotribology of MEMS/NEMS Materials and Devices

  • Bhushan B
Springer Berlin Heidelberg, (2004), 983-1021
DOI: 10.1007/3-540-29838-x_33
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Abstract

The field of MEMS MEMS/NEMS NEMS has expanded considerably over the last decade. The length scale and large surface-to-volume ratio of the devices result in very high retarding forces such as adhesion adhesion and friction friction that seriously undermine the...

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Bhushan, B. (2004). Micro/Nanotribology of MEMS/NEMS Materials and Devices. In Springer Handbook of Nanotechnology (pp. 983–1021). Springer Berlin Heidelberg. https://doi.org/10.1007/3-540-29838-x_33

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