Stacking two superconducting nanowire single-photon detectors via membrane microchip transfer

Abstract

Multilayer superconducting nanowire single-photon detectors (SNSPDs) have exhibited several advantages, such as increased detection efficiency, reduced polarization sensitivity, and scaling up to large arrays. However, monolithic fabrication of such multilayer devices is challenging. In this work, a hybrid integration method has been introduced by etching SNSPDs into the membrane microchips, followed by the pick and place transferring process. This method has been verified by stacking two SNSPDs orthogonally. Both detectors show near saturated detection efficiencies and low timing jitters. Furthermore, thermal coupling effects have been observed between the two SNSPDs. The photon detection pulses from either detector can trigger the other one almost deterministically with a latency of several nanoseconds. This method offers a flexible way to fabricate multilayer SNSPDs or integrate them with other heterogeneous devices.