Cite
CITATION STYLE
APA
Ishikawa, I., Suganomata, S., Amamiya, T., Akitsu, T., & Saito, Y. (1992). Frequency Dependence of RF Discharge in Low Pressure SF6 Gas. Shinku/Journal of the Vacuum Society of Japan, 35(3), 356–359. https://doi.org/10.3131/jvsj.35.356
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