Thin Film Growth in Nanostructured Materials

Abstract

In this chapter we focus on the impact that reactive transport and surface kinetics have on the coating of nanostructured and high surface area materials. We cover a series of approximations, including line of sight, constant reaction probability, more complex non-self limited kinetics characteristic from chemical vapor deposition, and self-limited interactions typical from atomic layer deposition. Different criteria to achieve highly conformal growth inside nanostructured or high surface area materials are introduced.