Channel Length Scaling Pattern for Cylindrical Surrounding Double-Gate (CSDG) MOSFET

Abstract

The natural length of MOSFETs helps to describe the potential distribution in the Silicon substrate. This natural length varies in different device structures, from a single gate to multi-gate device geometry. To measure the short channel effects degree, the natural length should be known because various vital parameters such as OFF-current, Roll-off threshold voltage, and drain induced barrier lowering depend on it. In this research work, authors have presented a scaling theory for Cylindrical Surrounding Double-Gate (CSDG) MOSFET, which guide the device design. The scaling method has been derived, based on the application of the Poisson equation, in a cylindrical structure using Parabolic Potential Approximation (PPA) along the radial direction (substrate part only). Furthermore, a comparison with cylindrical surrounding-gate MOSFETs, Silicon-on-insulator, and double-gate device geometries has been obtained. The results obtained using the PPA model show that CSDG MOSFET has the least natural length, making it a better component for SCEs immunity.