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Surface profile measurement using the confocal microscope

Journal of Applied Physics (1982) 53(7) 5320-5322
DOI: 10.1063/1.331391
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Abstract

A novel high-resolution non-contacting optical method of surface profile measurement is described and typical results presented. The method utilizes the depth discrimination properties of the nonfocal scanning optical microscope.

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APA

Hamilton, D. K., & Wilson, T. (1982). Surface profile measurement using the confocal microscope. Journal of Applied Physics, 53(7), 5320–5322. https://doi.org/10.1063/1.331391

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