Abstract
A novel high-resolution non-contacting optical method of surface profile measurement is described and typical results presented. The method utilizes the depth discrimination properties of the nonfocal scanning optical microscope.
Cite
CITATION STYLE
APA
Hamilton, D. K., & Wilson, T. (1982). Surface profile measurement using the confocal microscope. Journal of Applied Physics, 53(7), 5320–5322. https://doi.org/10.1063/1.331391
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