Abstract
We developed a continuous-wave infrared laser molecular beam epitaxy (CW-IR-LMBE) optimized for the fabrication of organic semiconductor films. The crystal quality of these organic thin films deposited by CW-IR-LMBE was substantially the same as those deposited by thermal evaporation. Due to the possibility of quick switching of evaporation sources, CW-IR-LMBE is especially advantageous for rapid screening of composition, thickness, and fabrication parameters in materials and device optimization based on combinatorial technology. © 2007 IOP Publishing Ltd.
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CITATION STYLE
Yaginuma, S., Yamaguchi, J., Haemori, M., Itaka, K., Matsumoto, Y., Kondo, M., & Koinuma, H. (2007). Continuous wave infrared laser deposition of organic thin films. Journal of Physics: Conference Series, 59(1), 520–525. https://doi.org/10.1088/1742-6596/59/1/112
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