Mode operation of inductively-coupled argon plasmas studied by optical emission spectroscopy

Abstract

Mode operation of inductively driven plasmas in argon gas at low pressures is studied by optical emission spectroscopy. The plasma source is a tandem type source with a driver and an expansion plasma region. The driver region of the discharge is in the classical form of a cylindrically shaped inductive discharge, with a coil positioned over a gas discharge tube. The inductively coupled plasma discharge is maintained at high frequency f 27 MHz, applied power varied in the limits P (20-700) W and gas pressure in the range p (8-260) mTorr. The Ar line intensity dependencies on the applied power injected into the discharge is analysed. With the power increase a mode transition of the discharge regime is not observed. The investigations on the discharge mode operation are supported by theoretical calculations based on kinetic modelling of main processes contributing to the line intensity behaviour. © 2007 IOP Publishing Ltd.