Robust microprobe systems for simultaneous neural recording and drug delivery

Abstract

This paper reports on novel robust microprobe systems for simultaneous neural recording and drug delivery. The systems comprise needle-shaped silicon probes with microfluidic channels and recording electrodes integrated into a robust polyetheretherketone (PEEK) packaging. The microprobes are fabricated using deep reactive ion etching (DRIE) of silicon combined with silicon wafer bonding, wafer grinding, and thin film processing. An integrated system assembly with mechanical, fluidic and electrical interfaces is developed for easy handling and robustness during operation. This enables the microprobe systems to be used in acute as well as chronic applications. The assembly process includes a dead volume free fluidic interconnection technology which attaches polytetrafluoroethylene (PTFE) tubing to the probes by using heat shrinkable tubing. Furthermore, the novel approach of system integration is characterized with respect to its mechanical, fluidic, and electrical properties. Finally, the operation of the microprobe systems is verified in acute in-vivo experiments in which liquid delivery and recording of neural signals is successfully demonstrated. © 2009 Springer Berlin Heidelberg.