Feedback control system for BioMEMS application

Abstract

In this paper, we present the designing of control system for cantilever based biosensor. We propose to fabricate the digital feedback control system which will take care of providing the predeflection of the cantilever beam to maintain the constant gap between the electrodes which is the major problem in fabrication. The control system is carried out with digital modules and are implemented using SPARTAN II FPGA. Also an Analog circuit is designed on PCB and interfaced with FPGA. © 2011 Springer-Verlag.