Ultra-precision Surfaces and Structures with Nanometer Accuracy by Ion Beam and Plasma Jet Technologies

Arnold, T., Franz, T., Frost, F., & Schindler, A. (2015). Ultra-precision Surfaces and Structures with Nanometer Accuracy by Ion Beam and Plasma Jet Technologies. In Encyclopedia of Nanotechnology (pp. 1–23). Springer Netherlands. https://doi.org/10.1007/978-94-007-6178-0_100926-1