Design, fabrication, and testing of a membrane piezoelectric tactile sensor with four sensing elements

Abstract

We presented design, fabrication, and testing of a novel membrane tactile sensing system with only four sensing elements. By using membrane stress combined with triangulation approach, it was possible to overcome the problems such as cross-talk between sensing elements, fragility, and complexity. The fabrication of the sensing elements performed using photolithographic and etching techniques. Position, orientation, and magnitude of applied loads through various flat shaped probes can be determined, by using only four sensing elements. © 2007 Science Publications.