Abstract
The development of an automated production of thin films and the characterization of their piezoelectric properties in high-throughput is described. A library of 50 undoped as well as doped lead zirconate titanate Pb(Zr,Ti)O3 (PZT) coatings was produced by sol deposition. Afterwards, the piezoelectric properties of the library films were analyzed by automated atomic force microscopy employing the ultrasonic piezo-mode. © Springer-Verlag Berlin Heidelberg 2007.
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CITATION STYLE
Rende, D., Maier, W. F., Schwarz, K., Rabe, U., & Arnold, W. (2007). Combinatorial synthesis of thin mixed oxide-films and examinations of their piezoelectricity by ultrasonic piezo-mode imaging. In Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics) (Vol. 4826 LNAI, pp. 80–83). Springer Verlag. https://doi.org/10.1007/978-3-540-76300-0_8
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