Scanning probe microscopy for nanolithography

Abstract

Scanning probe microscopy (SPM) has been used for both fabrication and characterization techniques of nanomaterials, nanostructures, or nanopatterning. There are two fundamental approaches such as scanning tunneling microscopy (STM) and atomic force microscopy (AFM) that are being used for the scanning probe lithography (SPL) process. In this chapter, we will discuss a recent development of nanolithography based upon new ideas and innovations of scanning probe microscopy and direct-write approach.