Monte Carlo Simulation of Multiple-Species Ion Implantation and its Application to the Modeling of 0.1µ PMOS Devices

Simionescu, A., Hobler, G., & Lau, F. (1995). Monte Carlo Simulation of Multiple-Species Ion Implantation and its Application to the Modeling of 0.1µ PMOS Devices. In Simulation of Semiconductor Devices and Processes (pp. 484–487). Springer Vienna. https://doi.org/10.1007/978-3-7091-6619-2_117